JPS6220452U - - Google Patents
Info
- Publication number
- JPS6220452U JPS6220452U JP11116485U JP11116485U JPS6220452U JP S6220452 U JPS6220452 U JP S6220452U JP 11116485 U JP11116485 U JP 11116485U JP 11116485 U JP11116485 U JP 11116485U JP S6220452 U JPS6220452 U JP S6220452U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- generating section
- plate
- deflection
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 5
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116485U JPS6220452U (en]) | 1985-07-20 | 1985-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116485U JPS6220452U (en]) | 1985-07-20 | 1985-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6220452U true JPS6220452U (en]) | 1987-02-06 |
Family
ID=30990831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11116485U Pending JPS6220452U (en]) | 1985-07-20 | 1985-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6220452U (en]) |
-
1985
- 1985-07-20 JP JP11116485U patent/JPS6220452U/ja active Pending